An inpack semiconductor module and a method of manufacturing the same. The module comprises a thin semiconductor substrate formed with atleast one electronic device at one surface thereof and a fluidics network at the opposite surface thereof separated from the electronic device. The fluidics network comprises a network of crisscross microchannels formed transversely along the semiconductor substrate with the microchannels interconnected to one another. The fluidics network further comprises a coolant inlet reservoir connected to the microchannels at one end thereof and a coolant outlet reservoir connected to the microchannels at the other end thereof. A mechanically strong transparent material cover is bonded onto the substrate at the said opposite surface thereof over the fluidics network with an insulating adhesive layer . The cover has formed therein an inlet hole connected to the inlet reservoir and an outlet hole connected to the outlet reservoir. The method comprises fabricating the atleast one electronic device at one surface of the semiconductor substrate in a known manner; fabricating the fluidics network at the opposite surface of the semiconductor substrate separated from the electronic device by selective etching in a known manner; forming the insulating adhesive coating selectively at the opposite surface of the semiconductor substrate over the microchannels and bonding the mechanically strong transparent material cover over the microchannels at the opposite surface of the semiconductor substrate in a known manner. The cover is formed with the inlet hole connected to the inlet reservoir and outlet hole connected to the outlet reservoir in a known manner.
An Inpack semiconductor module and a method of manufacturing the same
Patent Application No
298/MUM/2010