The invention relates to control methods and systems for increasing the scanning speed of a scanning probe microscope (SPM). By employing a sinusoidal pulse controller, the system quickly achieves steady-state oscillations without increasing the damping, thus maintaining low tapping forces essential for delicate samples. This method simplifies the control process, requires no additional hardware apart from a high sampling rate data acquisition system, and can be integrated into existing SPM setups. The technology offers significant improvements in scanning speed and precision, with applications spanning biomolecular research, semiconductor manufacturing, material science, and industrial quality control.
Figure (1) Uneven surface topography of the sample.
Conventional scanning probe microscopy (SPM) techniques are limited by the slow settling times of cantilever oscillations, which significantly hinder the speed and efficiency of surface topography measurements. This limitation is particularly problematic for high-resolution and high-throughput applications where both speed and precision are crucial. Additionally, existing methods that attempt to increase scanning speed often do so at the expense of higher tapping forces, which can damage delicate samples and compromise data accuracy.
- Model-Based Control: Utilizes a sinusoidal pulse controller to achieve quick steady-state without increasing damping, which maintains low tapping forces.
- Quick Adaptation: The probe adapts to changes in surface topography in only a few oscillations, significantly reducing scanning time.
- No Additional Hardware Required: The method only requires a high sampling rate data acquisition system, commonly used in high-speed SPM.
- Compatibility: Can be used in conjunction with active Q control to further improve scanning speeds and reduce tapping forces.
- Simplicity: The controller is simple to implement and integrates seamlessly with existing SPM systems.
The system includes a scanning probe microscope equipped with a cantilever and a sinusoidal pulse controller. Capable of high-speed scanning with minimal force, suitable for delicate and high-precision applications. Requires a data acquisition system with high sampling rates to detect the cantilever’s tip motion and implement real-time control actions.
Demonstration and/or validation in lab environment
4
Enhancing the speed and accuracy of scanning probe microscopy can significantly benefit various fields, including biomolecular research, semiconductor manufacturing, and material science. Faster and gentler scanning methods can lead to breakthroughs in nanotechnology and improved quality control in industrial applications.
Biotechnology, Semiconductor Manufacturing, Material Science, Nanotechnology, Quality Control in Manufacturing.
202221008486
430415