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Industrial Research And Consultancy Centre
Patent
Nano-Electro-Mechanical Switch
Abstract

This is a tiny device, called a nano-electro-mechanical device, that can be used for sensing substances in the air. It is made using advanced techniques on a semiconductor material with several layers, including metal electrodes and an oxide layer. 

The device has two main parts, called electrodes, which are separated by a small air gap. When a voltage is applied, the top electrode can move down to touch the bottom one, creating an electrical contact.

In one version, the device is designed to detect specific substances in the air. It has a special organic layer on top that absorbs these substances. When the substance is absorbed, it changes the device's properties, allowing it to detect the presence of the substance. The absorbed molecules can be removed by applying a voltage, resetting the device. 

The method to make this device involves several precise steps, including layering materials, using special coating processes, and patterning the electrodes with techniques like electron beam lithography. The result is a sensitive and tiny device capable of detecting airborne substances.

Societal Impact
  • Environmental Conservation: Facilitates early detection of pollution, helping the concerned authorities to make decisions on time for public welfare. 
  • Energy Efficiency: Reduces power consumption in electronic devices, contributing to lower energy usage.
Salient technical features and Advantages of the Technology
  • Tiny Sensor: A small device that can detect substances in the air and act as an electronic switch. Low Power: Uses very little power, hence it is suitable for modern electronic devices. 
  • High Sensitivity: Detects airborne substances with greater precision. 
  • Advanced Design: Made using specialized techniques for layering and patterning materials. Integrates switch and sensor functions in a single device. 
  • Easy Reset: This can be reset by applying a voltage to remove absorbed substances.


  • Tiny Sensor: A small device that can detect substances in the air and act as an electronic switch. Low Power: Uses very little power, hence it is suitable for modern electronic devices. 
  • High Sensitivity: Detects airborne substances with greater precision. 
  • Advanced Design: Made using specialized techniques for layering and patterning materials. Integrates switch and sensor functions in a single device. 
  • Easy Reset: This can be reset by applying a voltage to remove absorbed substances.
Technology readiness level

4

Current Status of Technology
  • Dual Functionality: The device can switch electrical signals and detect gases in air. 
  • Material Usage: Uses common metals and silicon, which are compatible with current technology. 
  • Design: Features a floating electrode that improves efficiency and performance. Sensing Layer: Coated with a special chemical layer to detect air pollutants. 
  • Prototype Success: Demonstrated working models for both switching and sensing functions.
Relevant Industries

Electronics, sustainable development, healthcare and safety devices, Advanced Communication Systems, Integrated Circuit Technology

Applications or Domain

Healthcare, security and defense, consumer electronics, wearable technologies like smartwatches, fitness trackers, headphones, smart glasses, sustainable development.