A method of depositing an amorphous-SiC:H barrier layer on a low dielectric material layer Read more about A method of depositing an amorphous-SiC:H barrier layer on a low dielectric material layer
A dry method for surface modification of SU-8 for immobilization of biomolecules using a hotwire induced pyrolytic process Read more about A dry method for surface modification of SU-8 for immobilization of biomolecules using a hotwire induced pyrolytic process
