- These days sensor-based devices have gained lot of popularity. Chemical and biological sensors is one such category of sensors. Electromechanical systems have received a lot of attention because of superior detection capability and Cantilever beam with dimension in micro or nanometer scale is a well adopted sensor structure already.
- Detection schemes of cantilever deflection may be categorized into electrical and optical approaches. In variety of known cantilever sensors, diverse readout capability still does not exist, thus limiting application of such cantilever sensors.
- Designing the cantilever sensor with each of the optical property and the electrical property on a similar sensor platform is a challenge from design and fabrication perspective. Furthermore, coupling of light inside the waveguide is one of the bottleneck in optical cantilever sensing devices.
Figure: Process flow of proposed device using iron oxide mask plates.
Sensor-based devices, especially chemical and biological sensors, are gaining widespread popularity. Among them, electromechanical systems like micro- or nanoscale cantilever beams are well-established due to their superior detection capabilities. Cantilever deflection detection typically uses electrical or optical methods, but most existing sensors lack multi- modal readout capabilities, limiting their applications. Integrating both optical and electrical sensing on a single platform poses significant design and fabrication challenges, particularly in coupling light into the waveguide. This innovation addresses these issues by aiming to fabricate a 2D-photonic crystal waveguide piezoresistive MEMS cantilever sensing device.
- Fabrication of Opto-Electro MEMS Cantilever: This method involves fabricating an opto-electro Micro-Electro-Mechanical Systems (MEMS) cantilever sensing device by selecting a cantilever with a predefined shape and multiple layers, including a top, middle, and last layer.
- Layer Removal Using Mask Plates: The fabrication process includes removing the top and middle layers using a first mask plate, and subsequently removing the middle and last layers using a second mask plate.
- Window Creation from Back Side: A third mask plate is used to create a window from the backside of the MEMS cantilever structure.
- Formation of Metal Contacts: Metal contacts for the third layer are created using a fourth mask plate, enabling electrical functionality in the device.
- Integration of Photonic Crystal and Final Release: A 2D photonic crystal (PhC) is formed on the top layer, and the MEMS cantilever sensor is released using Deep Reactive-Ion Etching (DRIE) to complete the fabrication process.
As this is a process so there is no prototype available.
The technology is currently at Technology Readiness Level (TRL) 4. A proof-of-concept prototype has been successfully fabricated and validated in a laboratory environment. The technology has demonstrated its intended functionality and is available for licensing.
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This patent enables the development of highly sensitive, compact, and dual-mode (optical and electrical) MEMS sensors, enhancing real-time detection of chemicals and biomolecules. Its societal impact includes improved healthcare diagnostics, environmental monitoring, and industrial safety, with potential for widespread, cost-effective deployment.
- Healthcare and Medical Diagnostics: Early detection of diseases through biomolecule sensing.
- Environmental Monitoring: Detection of pollutants, toxic gases, and contaminants.
- Industrial Safety: Monitoring hazardous chemicals in manufacturing or processing plants.
- Defense and Security: Sensing of chemical or biological threats.
- Wearable and Portable Sensors: For real-time personal or field-based monitoring.
- Lab-on-a-Chip Systems: Integration into compact diagnostic platforms for point-of- care testing.
Geography of IP
Type of IP
201821026735
430836