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Edge isolation tool

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Edge isolation tool is used for isolating the edge of diffused Si wafers and dry texturing.

Make and Model

BSET EQ, NT-2

Specifications/Features

  • Wafer loading capacity: single wafer to stack of 150 wafers

  • Wafer size: 125x125mm, 156x156mm,smaller wafers

  • Gases: SF6 , CF4 , O2 , N2

  • RF power supply: 600W, 13.56MHz

  • Platform: rotating

Facility in-charge

Contact Email

anilkg[at] ee[dot] iitb[dot] ac[dot] in

Location

NCPRE Fabrication Lab, 2nd Floor,

Nanoelectronics Building

Department of Electrical Engineering

(w.e.f. )

Registration Link:

http://www.ncpre.iitb.ac.in